Application of E800 in chip defect detection


As a kind of electronic component, semiconductor is widely used in modern electronic technology and is the core part of most electronic equipment, including integrated circuits, solar cells, optoelectronic devices, sensors, etc. In the environment of rapid development of technologies such as artificial intelligence, 5G, and IoT, many industries have embarked on the road to digital transformation, which has also brought huge semiconductor market demand. As the semiconductor market continues to develop, semiconductor production processes are gradually increasing. Therefore, efficient testing equipment has become an integral part of the semiconductor manufacturing process to ensure efficient and accurate production.


Take chip manufacturing as an example. Chip production requires multiple complex processes, and each process is interlocking. Chip production is sensitive to materials, environment, process parameters, etc., and defects may occur in every link. The chip production process includes four major links: chip design, manufacturing, packaging, and testing. The operation control, process parameters, environment, and other factors of the above-mentioned processes will have a certain impact on the chip quality, resulting in a variety of different defects, such as foreign matter, scratches, and scratches. Damage, Bump component defects (bulges, misalignment or missing), metallic contaminants and dirty etching fluid residues, etc. Chip appearance defect detection has the following requirements for machine vision inspection equipment:

1. Different defect shapes: In recent years, the structure of integrated circuits has become increasingly complex, the production processes have gradually increased, and the size has become smaller and smaller. The defects produced have also been reduced accordingly and have different shapes. This has put forward higher requirements for machine vision inspection. Require;

2. The detection background is complex: During detection, the difference between the defect area and the background area is small and the interference factors are large;

3. Continuous high-speed inspection: Due to the material characteristics of the chip, the entire visual inspection process must ensure no contact and no loss. At the same time, in order not to affect production, it is necessary to ensure high-speed, accurate, and continuous inspection.

Product Introduction


Future Robot E800 series is specially designed for the needs of semiconductor manufacturing applications with the following characteristics:

  • Based on Intel’s 10th generation Comet Lake-S platform processor

  • 2 x DDR4 SO-DIMM memory slots, supporting up to 64GB

  • 1 x DP, 1 x VGA, 1 x HDMI

  • 2 x Intel i226-V GbE LAN

  • 8 x USB 3.0

  • 2 x RS-232, 2 x RS-232/422/485

  • 1 x PCIe Gen3 x16, 1 x PCIe Gen2 x4 expansion slot

Interfaces Expansion

E800 is the "brain" of machine vision inspection equipment and serves as a support for the operation of vision software. E800 is based on Intel's 10th generation Comet Lake-S platform processor and adopts the H420E/Q470 chipset. It has multi-core and multi-threading and has more powerful CPU performance. It can process and analyze the collected data in real-time and smoothly. E800 adopts a unique multi-USB and multi-serial interface design, with 8 USB 3.0 interfaces (including 6 native USB 3.1), which can connect multiple USB cameras and sensors at the same time, supporting high-speed data transmission; 4 serial ports support RS- 232/422/485 are flexibly configured, using internal DIP switches, allowing users to flexibly choose according to application needs; 2 Ethernet interfaces controlled by Intel independent network card chips, which can be used to connect network cameras; 3 display interfaces support DP, VGA and HDMI displays. In addition, the E800 is equipped with 2 PCIe slots, and users can choose to connect expansion cards to further expand the interface.


Application advantages

1. Powerful, smooth, and efficient computing: E800 is based on Intel's 10th generation Comet Lake platform processor, which has powerful data processing capabilities and provides good computing power support for visual software to analyze and process images, and can quickly calculate and output results;

2. Rich interfaces and diverse expansions: E800 has multiple high-speed USB interfaces and serial ports, which can be compatible with different software, hardware, and terminal equipment. It can control multiple cameras for shooting at the same time, conduct high-speed inspection of products from multiple directions, and improve inspection efficiency;

3. Real-time detection and high precision: Based on its powerful computing power, the E800 supports real-time processing and analysis of collected data, accurately outputs detection results, and helps companies improve production efficiency and product yields.

4. Compact, rugged, and stable: E800 adopts an industrial-grade motherboard and a sturdy metal casing. It has been verified by a variety of industrial tests and can continue to operate stably in industrial environments.